Synthesis of ZnO Thin Films by Metal-Organic CVD of Zn(CH3COO)2

Chemical Vapor Deposition

Volumn 4, Issue 2, 1998, Pages 51-59

  Jain, Sanjeev ^a,c   Kodas, Toivo T ^a   Hampden Smith, Mark ^b  

^a University of New Mexico   (United States)

^b UNIVERSITY OF NEW MEXICO   (United States)

^c Watkins Johnson Company   (United States)

Author keywords

CVD; Kinetics; Zinc acetate; Zinc oxyacetate; ZnO

Indexed keywords

ACTIVATION ENERGY; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; REACTION KINETICS; SYNTHESIS (CHEMICAL);

OXYACETATE; ZINC ACETATE;

ZINC OXIDE;

EID: 0032021556     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1521-3862(199803)04:02<51::aid-cvde51>3.3.co;2-k     Document Type: Article

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24. -1 using a water bath. The pressure in the system was reduced to 5-10 mmHg. The zinc acetate was heated to ∼ 373 K to remove the water of hydration. The flask was then heated to ∼ 473 K at an absolute pressure of 5-10 mmHg. The condensed material on the cold finger was then removed after almost all the zinc acetate from the flask had been evaporated. The condensed material was then analyzed by NMR and identified as zinc oxyacetate with a trace amount of zinc acetate.