Pulsed plasma enhanced and hot filament chemical vapor deposition of fluorocarbon films

Journal of Fluorine Chemistry

Volumn 104, Issue 1, 2000, Pages 119-126

  Lau, Kenneth K S ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Chemical vapor deposition; Fluorocarbon films; Hot filament; Pulsed plasma; Solid state 19F and 13C NMR

Indexed keywords

EID: 0001711492     PISSN: 00221139     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-1139(00)00234-7     Document Type: Article

References (31)

1. Proceedings of Fluorine in Coatings III Conference, Grenelefe, Orlando, FL, 1999.
2. Yasuda H., Hsu T. J. Polym. Sci. Polym. Chem. Ed. 15:1977;81.
3. Savage C.R., Timmons R.B., Lin J.W. Adv. Chem. Ser. 236:1993;745.
4. Limb S.J., Edell D.J., Gleason E.F., Gleason K.K. J. Appl. Polym. Sci. 67:1998;1489.
5. Labelle C.B., Karecki S.M., Reif R., Gleason K.K. J. Vac. Sci. Technol. A. 17:1999;3419.
6. Limb S.J., Labelle C.B., Gleason K.K., Edell D.J., Gleason E.F. Appl. Phys. Lett. 68:1996;2810.
7. Limb S.J., Lau K.K.S., Edell D.J., Gleason E.F., Gleason K.K. Plasmas Polym. 4:1999;21.
8. Labelle C.B., Gleason K.K. J. Vac. Sci. Technol. A. 17:1999;445.
9. Lau K.K.S., Gleason K.K. J. Phys. Chem. B. 101:1997;6839.
10. Lau K.K.S., Gleason K.K. J. Phys. Chem. B. 102:1998;5977.
11. Lau K.K.S., Gleason K.K. J. Electrochem. Soc. 146:1999;2652.
12. Dixon W.T. J. Chem. Phys. 77:1982;1800.
13. Miller J.M. Prog. NMR Spectrosc. 28:1996;255.
14. Emsley J.W., Phillips L. Prog. NMR Spectrosc. 7:1971;1.
15. English A.D., Garza O.T. Macromolecules. 12:1979;351.
16. Dec S.F., Wind R.A., Maciel G.E. Macromolecules. 20:1987;2754.
17. Harris R.K., Jackson P. Chem. Rev. 91:1991;1427.
18. Tortelli V., Tonelli C., Corvaja C. J. Fluorine Chem. 60:1993;165.
19. Tonelli C., Tortelli V. J. Fluorine Chem. 67:1994;125.
20. Katoh E., Hiromi S., Kita Y., Ando I. J. Mol. Struct. 355:1995;21.
21. Knickelbein M.B., Webb D.A., Grant E.R. Mater. Res. Soc. Symp. Proc. 38:1985;23.
22. S.J. Limb, Ph.D. Thesis, Massachusetts Institute of Technology, Cambridge, 1997.
23. Ishikawa N., Maruta M. Nippon Kagaku Kaishi. 10:1977;1411.
24. Ovenall D.W., Chang J.J. J. Magn. Reson. 25:1977;361.
25. Kaplan S., Dilks A. J. Appl. Polym. Sci.: Appl. Polym. Symp. 38:1984;105.
26. Mallouk T., Hawkins B.L., Conrad M.P., Zilm K., Maciel G.E., Bartlett N. Phil Trans. R. Soc. Lond. A. 314:1985;179.
27. Schwerk U., Engelke F., Kleber R., Michel D. Thin Solid Films. 230:1993;102.
28. Hagaman E.W., Murray D.K., Del Cul G.D. Energy Fuels. 12:1998;399.
29. Millauer H., Schwertfeger W., Siegemund G. Angew. Chem. Int. Ed. Engl. 24:1985;161.
30. Creasy W.R., Zimmerman J.A., Jacob W., Kay E. J. Appl. Phys. 72:1992;2462.
31. L.A. Wall, in: L.A. Wall (Ed.), Fluoropolymers, Wiley, New York, 1972, p. 381.