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Volumn 71, Issue 11, 1997, Pages 1467-1468
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A spatially resolved optical emission sensor for plasma etch monitoring
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0041554115
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.119938 Document Type: Article |
Times cited : (10)
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References (8)
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