Tomographic Imagings of a Plasma Structure and Sputtered Particle in a Direct Current Magnetron Discharge

IEEE Transactions on Plasma Science

Volumn 24, Issue 1, 1996, Pages 109-110

  Itoh, A ^a   Makabe, T ^a   Shimura, N ^a   Tougo, S ^a  

^a Shibaura Engineering Works Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTERIZED TOMOGRAPHY; DEPOSITION; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRODES; INDUSTRIAL ROBOTS; LIGHT ABSORPTION; LIGHT EMISSION; MAGNETRON SPUTTERING; MAGNETRONS; PERMANENT MAGNETS; VISUALIZATION;

DIRECT CURRENT MAGNETRON DISCHARGE; EMISSION SELECTED COMPUTER TOMOGRAPHY; PLASMA STRUCTURE; TOMOGRAPHIC IMAGING;

PLASMAS;

EID: 0030085632     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.491736     Document Type: Article

References (3)

1. S. Miyake, N. Shimura, T. Makabe, and A. Itoh, Diagnostics of direct-current-magnetron discharges by the emission-selected computer-tomography technique, J. Vacuum Sci. Technol. A, vol. 10, pp 1135-1139, 1992.
2. A. Itoh, N. Shimura, T. Koike, and T. Makabe, Measurement of DC magnetron discharges in Ar by CT technique, in Proc. 10th Symp. Plasma Processing, Osaka, 1992, pp. 443-446.
3. A. C. Kak and M. Slaney, Principles of Computerized Tomographic Imaging. New York: IEEE, 1988.