Tomography of optical emission line intensities of a radio-frequency magnetron discharge

Applied Spectroscopy

Volumn 51, Issue 9, 1997, Pages 1340-1345

  Debal, F ^a   Wautelet, M ^a   Dauchot, J P ^a   Hecq, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

Author keywords

Glow discharge; Magnetron discharge; Optical emission spectrometry; Tomography

Indexed keywords

COMPUTERIZED TOMOGRAPHY; FIBER OPTICS; GLOW DISCHARGES; MAGNETRONS; SPECTROPHOTOMETERS;

RADIOFREQUENCY MAGNETRON DISCHARGE;

SPECTROMETRY;

EID: 0031220798     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702971942015     Document Type: Article

References (18)

1. D. H. Burns, Appl. Spectrosc. 48, 12A (1994).
2. N. C. Clampitt and G. M. Hieftje, Anal. Chem. 46, 382 (1974).
3. Z. J. Jin, Chung Chan, and C. Whitaker, Rev. Sci. Instrum. 59, 427 (1988)
4. J. O. Olsson, M. Lenner, S. Wallin, and L. Uneus, Rev. Sci. Instrum. 60, 2601 (1989)
5. M. J. Heintz, P. J. Galley, and G. M. Hieftje, Spectrochim. Acta 49B, 745 (1994).
6. R. D. Piccard and T. Vo-Dinh, Rev. Sci. Instrum. 62, 584 (1991).
7. V. Pavski, C. L. Chakrabarti, and R. E. Sturgeon, J. Anal, At. Spectrom. 9, 1399 (1994).
8. M. W. Blades and G. Horlick, Appl. Spectrosc. 34, 696 (1980).
9. M. W. Blades, Appl. Spectrosc. 37, 371 (1983).
10. C. A. Monnig, B. D. Gebhart, K. A. Marshall, and G. M. Hieftje, Spectrochim. Acta 45B, 261 (1990).
11. P. J. Galley and G. M. Hieftje, Spectrochim. Acta 48B, E1725 (1993).
12. W. Schielke, G. Röttig, A. Ohl, M. Hanneman, and W. Schleinitz, Surf. Coat. Technol. 74-75, 552 (1995).
13. S. Miyake, N. Shimura, T. Makabe, and A. Itoh, J. Vac. Sci. Technol. A 10, 1135 (1992).
14. A. K. Gilmutdinov, B. Radziuk, M. Sperling, B. Welz, and K. Yu Nagulin, Appl. Spectrosc. 49, 413 (1995).
15. T. Mehdi, P. B. Legrand, J. P. Dauchot, M. Wautelet, and M. Hecq, Spectrochim. Acta 48B, 1023 (1993).
16. G. Herman, Image Reconstruction from Projections: The Fundamentals of Computerized Tomography (Academic Press, Orlando, Florida, 1980).
17. J. C. Russ, The Image Processing Handbook (CRC Press, Boca Raton, Florida, 1995).
18. M. F. Dony, A. Ricard, J. P. Dauchot, M. Hecq, and M. Wautelet, Surf. Coat. Technol. 74-75, 479 (1995).