Correlation between the cathode erosion, the optical emission and the magnetic field distribution in magnetron sputtering systems

Journal of Physics D: Applied Physics

Volumn 31, Issue 8, 1998, Pages

  Debal, F ^a   Cammarata, F ^a   Wautelet, M ^a   Dauchot, J P ^a   Hecq, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION METHODS; ELECTRIC DISCHARGES; EQUATIONS OF MOTION; EROSION; LIGHT EMISSION; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; MAGNETRONS; MATHEMATICAL MODELS; SPECTROSCOPIC ANALYSIS;

ELECTRON CONFINEMENT; SPECTROSCOPIC OPTICAL TOMOGRAPHY;

CATHODES;

EID: 0032050989     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/8/001     Document Type: Article

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