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Volumn 35, Issue 9, 2000, Pages 2209-2213
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Carbon nitride films on diamond layers and their thermal behavior
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CARBON INORGANIC COMPOUNDS;
ELECTRIC CONDUCTIVITY OF SOLIDS;
ENERGY DISPERSIVE SPECTROSCOPY;
MAGNETRON SPUTTERING;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYCRYSTALLINE MATERIALS;
SILICON;
X RAY PHOTOELECTRON SPECTROSCOPY;
CARBON NITRIDE;
DIAMOND FILMS;
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EID: 0033749918
PISSN: 00222461
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1004718724457 Document Type: Article |
Times cited : (1)
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References (20)
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