Scanning transmission electron microscopy-energy dispersive X-ray/electron energy loss spectroscopy studies on SiC-on-insulator structures

Journal of the Electrochemical Society

Volumn 147, Issue 5, 2000, Pages 1979-1981

  Ishimaru, Manabu ^a   Dickerson, Robert M ^b   Sickafus, Kurt E ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; CRYSTAL ORIENTATION; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISPERSIVE SPECTROSCOPY; ION IMPLANTATION; OXYGEN; SCANNING ELECTRON MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY; STRUCTURE (COMPOSITION); TRANSMISSION ELECTRON MICROSCOPY;

CHEMICAL BONDING STATES; CHEMICAL DISORDERING; ELEMENTAL DISTRIBUTION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0033746983     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393470     Document Type: Article

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