Homogeneous Amorphization in High-Energy Ion Implanted Si

Physical Review Letters

Volumn 78, Issue 15, 1997, Pages 2980-2982

  Motooka, T ^a   Harada, S ^a   Ishimaru, M ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000307147     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.78.2980     Document Type: Article

References (13)

1. F. F. Morehead, Jr. and B. L. Crowder, Radiat. Eff. 6, 27 (1970).
2. M. L. Swanson, J. R. Parsons, and C. W. Hoelke, Radiat. Eff. 9, 249 (1971).
3. O. W. Holland, S. J. Pennycook, and G. L. Albert, Appl. Phys. Lett. 55, 2503 (1989).
4. T. Motooka, Phys. Rev. B 49, 16 367 (1994).
5. J. M. Cowley and A. F. Moodie, Acta Crystallogr. 10, 609 (1957).
6. P. A. Stadelmann, Ultramicroscopy 21, 131 (1987).
7. J. P. Biersack, Nucl. Instrum. Methods 174, 257 (1980).
8. T. Motooka, F. Kobayashi, Y. Hiroyama, and T. Tokuyama, Jpn. J. Appl. Phys. 32, 318 (1993).
9. M. K. El-Ghor, O. W. Holland, C. W. White, and S. J. Pennycook, J. Mater. Res. 5, 352 (1990). -GhorJMREEE.
10. J. Tersoff, Phys. Rev. B 37, 6991 (1988).
11. T. Motooka, Y. Hiroyama, R. Suzuki, T. Ohdaira, Y. Hirano, and F. Sato, Nucl. Instrum. Methods Phys. Res., Sect. B 106, 198 (1995).
12. S. Kugler, G. Molnár, G. Petö, E. Zsoldos, L. Rosta, A. Menelle, and R. Bellissent, Phys. Rev. B 40, 8030 (1989).
13. F. Wooten and D. Weaire, Solid State Physics (Academic, New York,1987), Vol. 40, p. 1.