High dose MeV oxygen ion implantation into SiC

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 141, Issue 1-4, 1998, Pages 160-163

  Wesch, W ^a   Heft, A ^a   Hobert, H ^a   Peiter, G ^a   Wendler, E ^a   Bachmann, T ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Ion implantation; SiC; Wave guides

Indexed keywords

ANNEALING; INFRARED RADIATION; ION IMPLANTATION; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; THERMAL EFFECTS;

SILICON CARBIDE BULK CRYSTALS;

SILICON CARBIDE;

EID: 0032067360     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00184-0     Document Type: Article

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