Insights into the ion-assisted nucleation of diamond on silicon

Journal of Materials Research

Volumn 12, Issue 12, 1997, Pages 3354-3366

  McGinnis, Sean P ^a,b   Kelly, Michael A ^a   Hagström, Stig B ^a  

^a Stanford University   (United States)

^b Interac Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DENSITY (SPECIFIC GRAVITY); ELECTRON EMISSION; ION BOMBARDMENT; MONTE CARLO METHODS; NUCLEATION; SPUTTERING; SUBSTRATES; THERMAL EFFECTS;

ION ASSISTED NUCLEATION; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION;

DIAMOND FILMS;

EID: 0031360405     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0440     Document Type: Article

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