Interphase in plasma-deposited silicon nitride optical films on polycarbonate: in situ ellipsometric characterization

Optical Engineering

Volumn 39, Issue 3, 2000, Pages 825-831

  Bergeron, Adam ^a,b   Poitras, Daniel ^a   Martinu, Ludvik ^a,c  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b JDS UNIPHASE   (United States)

^c CHARLES UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; GRADIENT INDEX OPTICS; INTERFACES (MATERIALS); OPTICAL COATINGS; OPTICAL DESIGN; OPTICAL FILTERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCARBONATES; REFRACTIVE INDEX; SILICON NITRIDE; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

INTERPHASE; SPECTROELLIPSOMETRIC ANALYSIS;

OPTICAL FILMS;

EID: 0033733220     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602433     Document Type: Article

References (20)

1. A. C. Greenham, B. A. Nichols, R. M. Wood, N. Nourshargh, and K. L. Lewis, "Optical interference filters with continuous refractive index modulations by microwave plasma-assisted chemical vapor deposition," Opt. Eng. 32(5), 1018-1024 (1993).
2. S. Lim, J. H. Ryu, J. F. Wager, and L. M. Casas, "Inhomogeneous dielectric grown by plasma-enhanced chemical vapor deposition," Thin Solid Films 236, 64-66 (1993).
3. J. C. Rostaing, F. Coeuret, B. Drevillon, R. Elemadi, C. Godet, J. Huc, J. Y. Parey, and V. A. Yakovlev, "Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD," Thin Solid Films 236, 58-63 (1993).
4. x deposited by electron cyclotron resonance plasma-enhanced deposition," Opt. Eng. 33, 2894-2897 (1994).
5. F. R. Flory, Ed., Thin Films for Optical Systems, Marcel Dekker, New York (1995).
6. L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, and M. R. Wertheimer, "Dual-mode microwave/radio frequency plasma deposition of dielectric thin films," Appl. Phys. Lett. 54(26), 2645-2647 (1989).
7. L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, and M. R. Wertheimer, "Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical-vapor deposition," J. Vac. Sci. Technol. A 12(4), 1360-1364 (1994).
8. D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, and L. Martinu, "Characterization of homogeneous and inhomogeneous Sibased optical coatings deposited in dual-frequency plasma," Opt. Eng. 35(9), 2690-2699 (1996).
9. J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, and L. W, Lantman, "Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma," J. Vac. Sci. Technol. A 15(3), 985-991 (1997).
10. D. Poitras and L. Martinu, "Simple method for determining slowly varying refractive-index profiles from in situ spectrophotometric measurements," Appl. Opt. 37(19), 4160-4167 (1998).
11. A. S. da Silva Sobrinho, N. Schüler, J. E. Klemberg-Sapieha, and M. R. Wertheimer, "Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): a multitechnique study of the interphase regions," J. Vac. Sci. Technol. A 16(4), 2021-2030 (1998).
12. 2 optical coatings studied by ellipsometry," J. Vac. Sci. Technol. A 16(6), 3227-3234 (1998).
13. S. Pankasem, J. Kuczynski, and J. K. Thomas, "Photochemistry and photodegradation of polycarbonate," Macromolecules 27(14), 3773-3781 (1994).
14. A. Holländer, J. E. Klemberg-Sapieha, and M. R. Wertheimer, "The influence of vacuum-ultraviolet radiation on poly(ethylene terephthalate)," J. Polym. Sci., Part A: Polym. Chem. 34, 1511 (1996).
15. S. Dahl, D. Rats, J. von Stebut, L. Martinu, and J. E. KlembergSapieha, "Nano- and micro-mechanical characterization of plasma treated polymer surfaces and plasma coated polycarbonates surface," Thin Solid Films 351, 1-5 (1999).
16. M. R. Wertheimer, A. C. Fozza, and A. Holländer, "Industrial processing of polymers by low pressure plasmas: the role of VUV radiation," Nucl. Instrum. Methods Phys. Res. B 151, 65-75 (1999).
17. A. C. Fozza, J. Roch, J. E. Klemberg-Sapieha, A. Kruse, A. Holländer, and M. R. Wertheimer, "Oxidation and ablation of polymers by vacuum-UV radiation from low pressure plasmas," Nucl. Instrum. Methods Phys. Res. B 131, 205-210 (1997).
18. O. Zabeida, J. E. Klemberg-Sapieha, and L. Martinu, "Effect of pulse mode on the plasma characteristics and on the treatment of polymers," in Society of Vacuum Coaters 41st Annual Technical Conf. Proc., Albuquerque, NM, pp. 336-341 (1998).
19. D. Rats, D. Poitras, J. M. Soro, L. Martinu, and J. von Stebut, "Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings," Surf. Coat. Technol. 111, 220-228 (1999).
20. D. Poitras and L. Martinu, "Interphase in plasma deposited silicon nitride films on polycarbonate: effect on the spectral properties of optical filters" Appl. Opt. 39(7) (2000).