Interphase in plasma-deposited films on plastics: Effect on the spectral properties of optical filters

Applied Optics

Volumn 39, Issue 7, 2000, Pages 1168-1173

  Poitras, Daniel ^a   Martinu, Ludvik ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL COATINGS; OPTICAL FILTERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASTICS; REFRACTIVE INDEX; SPECTROPHOTOMETRY;

SCRATCH-RESISTANT LAYERS;

OPTICAL FILMS;

EID: 0010041983     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.001168     Document Type: Article

References (18)

1. J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, and V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD, ” Thin Solid Films236, 58-63 (1993).
2. D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, and L. Martinu, “Characterization of homogeneous and inho-mogeneous Si-based optical coatings deposited in dualfrequency plasma, ” Opt. Eng. 35, 2690-2699 (1996).
3. J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, and L. W. Lantman, “Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma, ” J. Vac. Sci. Technol. A15, 985-991 (1997).
4. A. S. da Silva Sobrinho, N. Schiller, J. E. Klemberg-Sapieha, and M. R. Wertheimer, “Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): a multitechnique study of the interphase regions, ” J. Vac. Sci. Technol. A16, 2021-2030 (1998).
5. L. Martinu, “Plasma deposition and testing of hard coatings on plastics, ” in Plasma Processing ofPolymers, Vol. 346 of Applied Sciences, R. d’Agostino, P. Favia, and F. Fracassi, eds. (NATO ASI/Kluwer Academic, Dordrecht, The Netherlands, 1997), pp. 247-272.
6. E. M. Liston, L. Martinu, and M. R. Wertheimer, “Plasma surface modification of polymers for improved adhesion: a critical review, ” J. Adhes. Sci. Technol. 7, 1091-1127 (1993).
7. 2 optical coatings studied by ellipsometry, ” J. Vac. Sci. Technol. A16, 3227-3234 (1998).
8. A. Bergeron, D. Poitras, and L. Martinu, “Interphase in plasma deposited silicon nitride optical films on polycarbonate: in situ ellipsometric characterization, ” Opt. Eng. (to be published).
9. S. Vallon, A. Hofrichter, L. Guyot, B. Drevillon, J. E. Klemberg-Sapieha, L. Martinu, and F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate, ” J. Adhes. Sci. Technol. 10, 1287-1312 (1996).
10. J. E. Klemberg-Sapieha, L. Martinu, N. L. S. Yamasaki, and C. W. Lantman, in Plasma Deposition and Treatment of Polymers, Vol. 544 of Materials Research Society Symposium Proceedings, W. W. Lee, R. d’Agostino, and M. R. Wertheimer, eds. (Materials Research Society, Warrendale, Pa., 1998), pp. 277-281.
11. C. Montcalm, P. A. Kearney, J. M. Slaughter, B. T. Sullivan, M. Chaker, H. Pepin, and C. M. Falco, “Survey of Ti-, B-, and Y-based soft-x-ray extreme-ultraviolet multilayer mirrors for the 2-12-nm wavelength region, ” Appl. Opt. 35, 5134-5147 (1996).
12. L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, and M. R. Wertheimer, “Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical vapor deposition, ” J. Vac. Sci. Technol. A12, 1360-1364 (1994).
13. A. V. Tikhonravov, M. K. Trubetskov, B. T. Sullivan, and J. A. Dobrowolski, “Influence of small inhomogeneities on the spectral characteristics of single thin films, ” Appl. Opt. 36, 7188-7198 (1997).
14. F. Abeles, “Recherche sur la propagation des ondes électromagnétiques sinusoïdales dans les milieux stratifies. Application aux couches minces, ” Ann. Phys. (Paris) 5, 596 -640 (1950).
15. H. A. Macleod, Thin-Film Optical Filters, 2nd edition (Hilger, Bristol, 1986).
16. W. H. Southwell, “Coating design using very thin high- and low-index layers, ” Appl. Opt. 24, 457-460 (1985).
17. D. Rats, D. Poitras, J. M. Soro, L. Martinu, and J. von Stebut, “Mechanical properties of plasma-deposited silicon-based in-homogeneous optical coatings, ” Surf. Coat. Technol. 111, 220-228 (1999).
18. S. Dahl, D. Rats, J. von Stebut, L. Martinu, and J. E. Klemberg-Sapieha, “Nano- and micro-mechanical characterization of plasma-treated polymer surfaces and plasma-coated polycarbonates surface, ” Thin Solid Films351, 1-5 (1999).