Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 985-991

  Klemberg Sapieha, J E ^a   Poitras, D ^a   Martinu, L ^a   Yamasaki, N L S ^b   Lantman, C W ^c  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b JDS UNIPHASE   (United States)

^c Flex Products Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000571187     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580792     Document Type: Article

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