Oxidation and ablation of polymers by vacuum-UV radiation from low pressure plasmas

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 131, Issue 1-4, 1997, Pages 205-210

  Fozza, A C ^a   Roch, J ^a   Klemberg Sapieha, J E ^a   Kruse, A ^b   Hollander A ^c   Wertheimer, M R ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b FRAUNHOFER INSTITUTE FOR MANUFACTURING TECHNOLOGY AND ADVANCED MATERIALS IFAM   (Germany)

^c FRAUNHOFER INSTITUTE FOR APPLIED POLYMER RESEARCH   (Germany)

Author keywords

Low pressure plasmas; Polymer oxidation; Vacuum ultraviolet

Indexed keywords

ABLATION; GLOW DISCHARGES; OLIGOMERS; OXIDATION; PLASMA APPLICATIONS; PLASTIC FILMS; POLYETHYLENES; POLYMETHYL METHACRYLATES; RADIATION EFFECTS; SURFACE TREATMENT; ULTRAVIOLET RADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

LOW PRESSURE PLASMAS; QUARTZ CRYSTAL MICROBALANCE (QCM);

POLYMERS;

EID: 0031549172     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00154-7     Document Type: Article

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