Cluster-surface collisions by phase-space compressed guided-ion beam methods

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 157, Issue 1-4, 1999, Pages 144-154

  Boyd, Kevin J ^a   Łapicki, Adam ^a   Aizawa, Masato ^a   Anderson, Scott L ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; COPPER; DEPOSITION; INTERFACES (MATERIALS); ION IMPLANTATION; ION SOURCES; IRRADIATION; MOLYBDENUM; SURFACES;

BEAMLINE; CLUSTER ION; CLUSTER SURFACE COLLISIONS; ION BEAM DEPOSITION; PHASE SPACE COMPRESSED GUIDED ION BEAM METHODS;

ION BEAMS;

EID: 0033516778     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00414-0     Document Type: Article

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