Energetic cluster impact (ECI): A new method for thin-film formation

Surface Review and Letters

Volumn 3, Issue 1, 1996, Pages 887-890

  Haberland, Hellmut ^a   Moseler, Michael ^a   Qiang, You ^a   Rattunde, Oliver ^a   Reiners, Thomas ^a   Thurner, Yonca ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000104297     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X96001595     Document Type: Article

References (14)

1. H. Haberland, M. Karrais, M. Mall, and Y. Thurner, J. Vac. Sci. Technol. A10, 3266 (1992).
2. H. Haberland et al., J. Vac. Sci. Technol. A12, 2925 (1994).
3. H. Haberland, Z. Insepov, and M. Moseler, Z. Phys. D26, 229 (1993).
4. H. Haberland, Z. Insepov, and M. Moseler, Phys. Rev. B, in press.
5. I. Yamada, proceedings of this conference.
6. R. L. McEachern et al., J. Vac. Sci. Technol. A9, 3105 (1991) and references therein.
7. See, e.g., P. Melinon et al., proceedings of this conference.
8. O. F. Hagena, Rev. Sci. Instrum. 63, 2374 (1992).
9. B. Chapman, Glow Discharge Processes (Wiley, New York, 1982).
10. The operational principles of gas-aggregation sources and several other cluster-related techniques are described in Experimental Techniques, Chapter 3 of Clusters of Atoms and Molecules I, ed. H. Haberland, Springer Tracts in Chemical Physics, Vol. 52 (Springer, Berlin, 1994).
11. C. Granqvist and R. Buhrmann, J. Appl. Phys. 47, 2200 (1976).
12. H. Haberland et al., unpublished results.
13. M. Moseler and H. Haberland, in preparation.
14. S. M. Rossnagel, D. Mikalsen, H. Kinoshita, and J. J. Cuomo, J. Vac. Sci. Technol. A9, 261 (1991) and references therein.