Semiquantitative subplantation model for low energy ion interactions with surfaces. I. Noble gas ion-surface interactions

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 444-454

  Boyd, K J ^a,c   Marton, D ^a   Rabalais, J W ^a   Uhlmann, S ^b   Frauenheim, Th ^b  

^a University of Houston   (United States)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032384614     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581042     Document Type: Article

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