High-yield drying process for surface microstructures using active levitation

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 241-244

  Liu, Chang ^a   Tsao, Thomas ^a   Tai, Yu Chong ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DRYING; ETCHING; MAGNETIC LEVITATION; MICROMACHINING; STICTION;

SURFACE MICROSTRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0030659905     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)