Surface chemistry investigation of the low pressure nitridation of Si(100) using 1,1-dimethylhydrazine

Applied Surface Science

Volumn 152, Issue 1, 1999, Pages 85-98

  Robinson, David W ^a   Rogers Jr , J W ^a  

^a University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; AMMONIA; DECOMPOSITION; DISSOCIATION; HYDRAZINE; HYDROGEN BONDS; NITRIDING; SURFACE CHEMISTRY; TEMPERATURE PROGRAMMED DESORPTION; X RAY PHOTOELECTRON SPECTROSCOPY;

DIMETHYLHYDRAZINE;

SEMICONDUCTING SILICON;

EID: 0033328914     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00305-0     Document Type: Article

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