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Volumn 120, Issue 3-4, 1997, Pages 299-305
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Thermal decomposition of 1, 1-dimethylhydrazine on Si(100)-2 × 1
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
AMINES;
ANNEALING;
AUGER ELECTRON SPECTROSCOPY;
CARBIDES;
CHEMICAL BONDS;
NITRIDES;
PYROLYSIS;
SECONDARY ION MASS SPECTROMETRY;
SEMICONDUCTING SILICON;
TEMPERATURE PROGRAMMED DESORPTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
BOND CLEAVAGE;
DIMETHYLHYDRAZINE;
NITROGEN COMPOUNDS;
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EID: 0031380296
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(97)00236-5 Document Type: Article |
Times cited : (11)
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References (27)
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