Chemical vapor deposition of barium strontium titanate films with direct liquid injection of single-mixture solution

Journal of the Electrochemical Society

Volumn 146, Issue 10, 1999, Pages 3783-3787

  Lee, Jung Hyun ^a   Rhee, Shi Woo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMINES; BARIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; DIFFERENTIAL SCANNING CALORIMETRY; LEAKAGE CURRENTS; THERMODYNAMIC STABILITY; THIN FILMS;

BARIUM STRONTIUM TITANATE;

DIELECTRIC FILMS;

EID: 0033327741     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1392550     Document Type: Article

References (8)

1. T. Kawahara, M. Yamamuka, T. Makita, K. Tsutahara, A. Yuuki, K. Ono, and Y. Matsui, Jpn. J. Appl. Phys., 33, 5897 (1996).
2. S. Yamamichi, T. Sakuma, K. Takemura, and Y. Miyasaka, Jpn. J. Appl. Phys., 30, 2193(1991).
3. H. Yamaguchi, S. Matsubara, and Y. Miyasaka, Jpn. J. Appl. Phys., 30,2197 (1991).
4. C.S. Kang, H. J. Cho, C. S. Hwang, and B. T. Lee, Jpn. J. Appl. Phys., 36, 6946 (1997).
5. C. Basceri, S. K. Streiffer, A. I. Kingon, and R. Waser, J. Appl. Phys., 82, 2497 (1997).
6. W.J. Lee, C. Basceri, S. K. Streiffer, A. I. Kingon, D. Y. Young, Y. Park, and II. G. Kim, Thin Solid Films, 323, 285 (1998).
7. R. Garniner, D. W. Brown, P. S. Kirlin, and A. L. Rheingold, Chem. Mater., 3,1053 (1991).
8. T.K. Kimura, H. Yamauchi, H. Machida, H. Kokuban, and M. Yamada, Jpn. J. Appl, 33,5119(1994).