Srtio3 thin film preparation by ion beam sputtering and its dielectric properties

Japanese Journal of Applied Physics

Volumn 30, Issue 9S, 1991, Pages 2193-2196

  Yamamichi, Shintaro ^a   Sakuma, Toshiyuki ^a   Takemura, Koichi ^a   Miyasaka, Yoichi ^a  

^a NEC CORPORATION   (Japan)

Author keywords

Capacitor; Dielectric constant; Ferroelectric thin film; Ion beam sputtering; Leakage current

Indexed keywords

FILMS - DIELECTRIC PROPERTIES; ION BEAMS; SPUTTERING; STRONTIUM COMPOUNDS;

DIELECTRIC CONSTANT; ION BEAM SPUTTERING; LEAKAGE CURRENT; STRONTIUM TITANATE;

FERROELECTRIC MATERIALS;

EID: 0026224812     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.30.2193     Document Type: Article

References (5)

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5. Y. Miyasaka and S. Matsubara:to be published in Proc. 7th Int. Symp. the Applications of Ferroelectrics, Illinois, 1990(IEEE, New York, 1991).