SCOPUS 정보 검색 플랫폼

Volumn 33, Issue 9 S, 1994, Pages 5119-5124

Synthesis of novel sr sources for metalorganic chemical vapor deposition of SrTiO3

(5) Kimura, Takafumi a Yamauchi, Hideaki a Machida, Hideaki b Kokubun, Hiroshi b Yamada, Masao a

b Tri Chemical Laboratory Inc ^* (Japan)

Author keywords

Adduct; Amine; MOCVD; Sr source; Sr(DPM)2; Sr(DPM)2 tetraen2; Sr(DPM)2 trien2; SrTiO3; Tetraethylenepentamine; Triethylenetetramine

Indexed keywords

AMINES; CURRENT DENSITY; DIFFERENTIAL THERMAL ANALYSIS; FILM PREPARATION; HEAT TREATMENT; LEAKAGE CURRENTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; STRONTIUM COMPOUNDS; SYNTHESIS (CHEMICAL); THERMOGRAVIMETRIC ANALYSIS; THIN FILMS;

STRONTIUM TITANATE; TETRAETHYLENEPENTAMINE; TRIETHYLENETETRAMINE;

FERROELECTRIC MATERIALS;

EID: 0028513239 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.33.5119 Document Type: Article

Times cited : (54)

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