Reactive coevaporation synthesis and characterization of srtic3 thin films

Japanese Journal of Applied Physics

Volumn 30, Issue 9S, 1991, Pages 2197-2199

  Yamaguchi, Hiromu ^a   Matsubara, Shogo ^a   Miyasaka, Yoichi ^a  

^a NEC CORPORATION   (Japan)

Author keywords

Capacitor; Dielectric constant; Ferroelectric thin film; Reactive coevaporation

Indexed keywords

FERROELECTRIC MATERIALS - DIELECTRIC PROPERTIES; STRONTIUM COMPOUNDS;

DIELECTRIC CONSTANT; REACTIVE COEVAPORATION; STRONTIUM TITANATE;

FERROELECTRIC MATERIALS;

EID: 0026224033     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.30.2197     Document Type: Article

References (4)

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3. G. Campet, M. Carrere, C. Pupridritkun, S. Z. Wen, J. Salardenne and J. Claverie: J. Solid State Chem. 69 (1987) 267.
4. S. Matsubara, T. Sakuma, S. Yamamichi, H. Yamaguchi and Y. Miyasaka: Proc. Mater. Res. Soc. 1990 Spring Meeting; Mater. Res. Soc. Symp. Proc. 200 (Matereals Research Society, Pittsburgh, 1990) p. 243.