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Volumn 14, Issue 6, 1996, Pages 3924-3927

HPR 506 photoresist used as a positive tone ion resist

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342934107 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.588696 Document Type: Article

Times cited : (4)

References (11)

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- Günther Stangl (private communication).
- Stangl, G.¹

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- Karapiperis, L.¹ Adesida, I.² Lee, C.A.³ Wolf, E.D.⁴

3
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- K. Hoffmann, K. Haberger, M. Forster, and H. Ryssel, Microcircuit Eng. 82, 165 (1982).
- (1982) Microcircuit Eng. , vol.82 , pp. 165
- Hoffmann, K.¹ Haberger, K.² Forster, M.³ Ryssel, H.⁴

4
- 4243065056
- H. Löschner, G. Stengl, I. L. Berry, J. N. Randall, J. C. Wolfe, W. Finkelstein, R. W. Hill, J. Melngailis, L. R. Harriott, W. Bruenger, and L.-M. Buchmann, Microlithography World 3, 4 (1994).
- (1994) Microlithography World , vol.3 , pp. 4
- Löschner, H.¹ Stengl, G.² Berry, I.L.³ Randall, J.N.⁴ Wolfe, J.C.⁵ Finkelstein, W.⁶ Hill, R.W.⁷ Melngailis, J.⁸ Harriott, L.R.⁹ Bruenger, W.¹⁰ Buchmann, L.-M.¹¹

5
- 0009408442
- L.-M. Buchmann, U. Schnakenberg, M. Torkler, H. Löschner, G. Stengl, C. Traher, W. Fallmann, G. Stangl, and E. Cekan, J. Microelectromech. Syst. 1, 116 (1992).
- (1992) J. Microelectromech. Syst. , vol.1 , pp. 116
- Buchmann, L.-M.¹ Schnakenberg, U.² Torkler, M.³ Löschner, H.⁴ Stengl, G.⁵ Traher, C.⁶ Fallmann, W.⁷ Stangl, G.⁸ Cekan, E.⁹

6
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- W. H. Bruenger, L.-M. Buchmann, F. Naumann, D. Friedrich, W. Finkelstein, and R. Mohondro, J. Vac. Sci. Technol. B 13, 2561 (1995).
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 2561
- Bruenger, W.H.¹ Buchmann, L.-M.² Naumann, F.³ Friedrich, D.⁴ Finkelstein, W.⁵ Mohondro, R.⁶

7
- 5344257342
- OLIN Microelectronic Materials N. V., Belgium; (a) Data Brochure; (b) MSDS (Material Safety Data Sheet) for HPR 506 and PLSI Developer
- OLIN Microelectronic Materials N. V., Belgium; (a) Data Brochure; (b) MSDS (Material Safety Data Sheet) for HPR 506 and PLSI Developer.

8
- 0344080002
- W. H. Bruenger, L.-M. Buchmann, M. Torkler, and W. Finkelstein, J. Vac. Sci. Technol. B 12, 3547 (1994).
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 3547
- Bruenger, W.H.¹ Buchmann, L.-M.² Torkler, M.³ Finkelstein, W.⁴

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