Nuclear microprobe analysis and imaging: Current state of the art performances

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 313-317

  Watt, F ^a   Osipowicz, T ^a   Choo, T F ^a   Orlic, I ^a   Tang, S M ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ALPHA PARTICLES; IMAGING TECHNIQUES; ION BEAMS; MICROSCOPIC EXAMINATION; PROTONS; STANDARDS; X RAY LITHOGRAPHY;

ION BEAM INDUCED CHARGE (IBIC); NUCLEAR MICROPROBE ANALYSIS; PARTICLE INDUCED X RAY EMISSION (PIXE) IMAGING; SCANNING TRANSMISSION ION MICROSCOPY (STIM);

NUCLEAR INSTRUMENTATION;

EID: 0032017090     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00710-6     Document Type: Article

References (11)

1. F. Watt, G.W. Grime, The high energy ion microprobe, in: S.A.E. Johannson, J.L. Campbell, K.G. Malmqvist, Particle Induced X-ray Emission Spectrometry, ch. 3, Wiley, New York, 1995, pp. 101-165.
2. G.W. Grime, F. Watt, Nucl. Instr. and Meth. B 75 (1993) 495-503.
3. F. Watt, T.F. Choo, K.K. Lee, T. Osipowicz, I. Orlic, S.M. Tang, Nucl. Instr. and Meth. B 104 (1995) 101-106.
4. F. Watt, Nucl. Instr. and Meth. B 104 (1995) 647-648.
5. K. Traxel, Comment at the Workshop on Nuclear Microprobe Resolution Measurements, in: The Fifth International Conference on Nuclear Microprobe Technology and Applications, Santa Fe, 1996.
6. T. Kamiya, T. Suda, R. Tanaka, Nucl. Instr. and Meth. B 104 (1995) 43-48.
7. G.S. Bench, G.J.F. Legge, Nucl. Instr. and Meth. B 40/41 (1989) 655-658.
8. U. Watjen, A.J. Deruytter, Institute for Reference Materials and Measurements, private communication 1997.
9. F. Watt, I. Orlic, K.K. Loh, C.H. Sow, P. Thong, S.C. Liew, T. Osipowicz, T.F. Choo, S.M. Tang, Nucl. Instr. and Meth. B 85 (1994) 708-715.
10. Ebeam test specimen: manufactured by Technology Dept., IMS Stuttgart, and marketed by Agar Scientific, 66a Cambridge Road, Stansted, Essex, CM24 8DA, UK (fax (0278) 815106).
11. X-ray mask: Kindly provided by Haruo Tsuyuzaki, NTT LSI Laboratories, Japan.