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Volumn 353, Issue 1, 1999, Pages 1-7
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Current induced effects in aluminum thin films
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
ATOMIC FORCE MICROSCOPY;
DEGRADATION;
ELECTROMIGRATION;
METALLIC FILMS;
PLASTIC DEFORMATION;
SILICON;
STRESSES;
THERMAL EFFECTS;
THERMAL EXPANSION;
THERMAL VARIABLES MEASUREMENT;
X RAY DIFFRACTION ANALYSIS;
CURRENT INDUCED EFFECTS;
FREE EVAPORATION;
GRAZING INCIDENCE X RAY DIFFRACTION;
JOULE EFFECT;
THIN FILMS;
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EID: 0033308317
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(99)00370-3 Document Type: Article |
Times cited : (13)
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References (26)
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