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Physical Review E

Volumn 51, Issue 2, 1995, Pages 1376-1390

Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor

(2) Boeuf, J P a Pitchford, L C a

a UNIVERSITY OF COLORADO (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 35949008125 PISSN: 1063651X EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevE.51.1376 Document Type: Article

Times cited : (290)

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