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Journal of Applied Physics

Volumn 74, Issue 6, 1993, Pages 3744-3751

A two-dimensional fluid model for an argon rf discharge

(2) Passchier, J D P a Goedheer, W J a

a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001137106 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.354487 Document Type: Article

Times cited : (175)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.