Two-dimensional analysis of radio frequency discharges

IEEE Transactions on Plasma Science

Volumn 24, Issue 1, 1996, Pages 119-120

  Meyyappan, M ^a   Govindan, T R ^a  

^a Scientific Research Associates Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ARGON; BOUNDARY CONDITIONS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; ELECTRON TRANSPORT PROPERTIES; ELECTRONIC DENSITY OF STATES; IONS; MATHEMATICAL MODELS; NUMERICAL METHODS;

BOLTZMANN EQUATION; CHARGED PARTICLE TRANSPORT; MOMENTUM EQUATIONS; RADIO FREQUENCY DISCHARGES; TWO DIMENSIONAL MODEL; ZERO DIMENSIONAL BOLTZMANN SOLVER;

PLASMA SOURCES;

EID: 0030083711     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.491741     Document Type: Article

References (4)

1. M. Meyyappan, "Plasma process modeling," in Computational Modeling in Semiconductor Processing, M. Meyyappan, Ed. Norwood, MA: Artech House, 1994.
2. D. Lymberopoulos and D. J. Economou, "Modeling and simulation of glow discharge plasma reactors," J. Vacuum Sci. Technol. A, vol. 12. pp. 1229-1236, 1994.
3. J. P. Bouef and L. C. Pitchford, "Two-dimensional model of a capacitively coupled RF discharge and comparisons with experiments in the gaseous electronics conference reference reactor," Phys. Rev. E, vol. 51, pp. 1376-1390, 1995.
4. L. Z. Ovcrzet and M. B. Hopkins, "Spatial variations in the charge density of argon discharges in the gaseous electronics conference reference reactor, Appl. Phys. Lett., vol. 63, pp. 2484-2486, 1993.