MOCVD of electroceramic oxides: a precursor manufacturer's perspective

Journal De Physique. IV : JP

Volumn 9 pt 2, Issue 8, 1999, Pages

  Jones, A C ^a   Leedham, T J ^a   Brooks, J ^a   Davies, H O ^a  

^a Inorgtech Limited   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; CAPACITORS; DATA STORAGE EQUIPMENT; ELECTROOPTICAL DEVICES; FERROELECTRIC MATERIALS; INFRARED DETECTORS; INFRARED IMAGING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PHYSICAL PROPERTIES; SEMICONDUCTOR DEVICE MANUFACTURE; SQUIDS; THIN FILMS;

ELECTROCERAMIC OXIDE FILMS; METAL ALKOXIDES;

CERAMIC MATERIALS;

EID: 0033187940     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1999869     Document Type: Article

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