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Volumn 415, Issue , 1996, Pages 79-85
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From proposal to product: scaling up the chemical synthesis of MOCVD oxide precursors
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Author keywords
[No Author keywords available]
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Indexed keywords
AVAILABILITY;
FREE RADICALS;
IMPURITIES;
MANUFACTURE;
MOLECULES;
OXIDES;
PYROLYSIS;
RAW MATERIALS;
SYNTHESIS (CHEMICAL);
THIN FILMS;
ALKOXIDES;
DIKOTONITES;
MOISTURE DAMAGE;
MOISTURE SUSCEPTIBILITY;
MULTI-KILO SYNTHESIS;
OXIDE PRECURSORS;
SHELF LIFE;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
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EID: 0029770939
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (10)
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References (20)
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