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Volumn 40, Issue C, 1996, Pages 215-340

A Review of Group 2(Ca, Sr, Ba) Metal-Organic Compounds as Precursors for Chemical Vapor Deposition

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EID: 77956735077     PISSN: 00653055     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S0065-3055(08)60535-3     Document Type: Chapter
Times cited : (90)

References (371)
  • 2
  • 44
    • 77956727880 scopus 로고    scopus 로고
    • Sievers, R. E., Hanson, B. N. University of Colorado. U.S. Patent 4,970,093, 1990.
    • Sievers, R. E., Hanson, B. N. University of Colorado. U.S. Patent 4,970,093, 1990.
  • 50
    • 0004004688 scopus 로고
    • Kodas T.T., and Hampden-Smith M.J. (Eds), VCH, Weinheim
    • Zinn A. In: Kodas T.T., and Hampden-Smith M.J. (Eds). The Chemistry of Metal CVD (1994), VCH, Weinheim
    • (1994) The Chemistry of Metal CVD
    • Zinn, A.1
  • 224
    • 84942746816 scopus 로고
    • Wilkinson G., Stone F.G.A., and Abel E.W. (Eds), Pergamon Press, Oxford
    • Lindsell W.E. In: Wilkinson G., Stone F.G.A., and Abel E.W. (Eds). Comprehensive Organometallic Chemistiy 1 (1982), Pergamon Press, Oxford 155
    • (1982) Comprehensive Organometallic Chemistiy , vol.1 , pp. 155
    • Lindsell, W.E.1
  • 267
    • 77956763505 scopus 로고    scopus 로고
    • PhD dissertation
    • Archer, L. PhD dissertation, 1996.
    • (1996)
    • Archer, L.1
  • 341
    • 77956787818 scopus 로고
    • Japanese Patent 91-221721 910902; Nippon Telegraph and Telephone Corp., Japan,
    • Jpn. Kokai Tokkyo Koho
    • Sato, K., Sugawara, S. Japanese Patent 91-221721 910902; Nippon Telegraph and Telephone Corp., Japan, Jpn. Kokai Tokkyo Koho, 1991.
    • (1991)
    • Sato, K.1    Sugawara, S.2
  • 342
    • 77956758704 scopus 로고
    • Japanese Patent 89-41859 890223; Asahi Glass Co., Ltd., Japan,
    • Jpn. Kokai Tokkyo Koho
    • Yamada, Y., Morimoto, T. Japanese Patent 89-41859 890223; Asahi Glass Co., Ltd., Japan, Jpn. Kokai Tokkyo Koho, 1989.
    • (1989)
    • Yamada, Y.1    Morimoto, T.2
  • 343
    • 77956758704 scopus 로고
    • Japanese Patent 89-41860 890223; Asahi Glass Co., Ltd., Japan,
    • Jpn. Kokai Tokkyo Koho
    • Yamada, Y., Morimoto, T. Japanese Patent 89-41860 890223; Asahi Glass Co., Ltd., Japan, Jpn. Kokai Tokkyo Koho, 1989.
    • (1989)
    • Yamada, Y.1    Morimoto, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.