Microfabrication of capacitive ultrasonic transducers

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 437-440

  Jin, X C ^a   Ladabaum, I ^a   Khuri Yakub, B T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SIGNAL TO NOISE RATIO; ULTRASONIC TRANSMISSION;

CAPACITIVE ULTRASONIC TRANSDUCERS;

ULTRASONIC TRANSDUCERS;

EID: 0030717921     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)