Application and characterization of combined SNOM/SFM cantilever probes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3009, Issue , 1997, Pages 130-140

  Werner, Stephfan ^a   Münster, Stefan ^a   Heisig, Sven ^a   Mihalcea, Christopher ^a   Scholz, Wenzel ^a   Oesterschulze, Egbert ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

Aperture probes; Double aperture probes; Microfabrication; Scanning force microscopy (SFM); Scanning near field optical microscopy (SNOM); Scanning probe microscopy (SPM)

Indexed keywords

ATOMIC FORCE MICROSCOPY; BATCH DATA PROCESSING; COMPOSITE MICROMECHANICS; LIGHT TRANSMISSION; MACHINING; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; NANOCANTILEVERS; OPTICAL DATA STORAGE; OPTICAL INSTRUMENTS; OPTICAL MICROSCOPY; OPTICAL PROPERTIES; OPTICAL SYSTEMS; PROBES; SCANNING; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY; SCANNING TUNNELING MICROSCOPY; SELF PHASE MODULATION; STATISTICAL PROCESS CONTROL;

APERTURE PROBES; DOUBLE APERTURE PROBES; SCANNING FORCE MICROSCOPY (SFM); SCANNING NEAR-FIELD OPTICAL MICROSCOPY (SNOM); SCANNING PROBE MICROSCOPY (SPM);

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

EID: 0013576807     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271221     Document Type: Conference Paper

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