Experimental and theoretical characterization of aperture probe cantilevers for polarization sensitive SNOM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3467, Issue , 1998, Pages 99-105

  Rudow, O ^a   Mihalcea, C ^a   Vollkopf, A ^a   Oesterschulze, E ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

Aperture probes; Micro electro mechanical systems (MEMS); Polarization near field microscopy; Scanning near field optical microscopy (SNOM); Scanning probe microscopy (SPM); Theoretical modelling of aperture probes

Indexed keywords

ASPECT RATIO; ETCHING; FILMS; LIGHT POLARIZATION; LIGHT TRANSMISSION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; PROBES; SEMICONDUCTING SILICON;

APERTURE PROBES; POLARIZATION SENSITIVE SCANNING NEAR-FIELD OPTICAL MICROSCOPY;

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

EID: 0013630778     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.326808     Document Type: Conference Paper

References (22)

1. D. W. Pohl, W. Denk, and M. Lanz, "Optical stethoscopy: image recording with resolution λ/20," Appl. Phys. Lett. 44, pp. 651-653, 1984.
2. E. Betzig, A. Lewis, and M. Isaacson, "Near-field scanning optical microscopy: development and application," Biophysical Society 49, pp. 269-279, 1986.
3. E. Betzig and J. K. Trautman, "Polarization contrast in near-field scanning optical microscopy," Applied Optics 31, pp. 4563-4568, 1992.
4. E. Betzig and R. J. Chichester, "Single Molecules Observed by Near-Field Scanning Microscopy," Science 262, pp. 1422-1425, 1993.
5. D. A. Smith, S. Webster, M. Ayad, S. D. Evans, D. Fogherty, and D. Batchelder, "Development of a scanning near-field optical probe for localised Raman spectroscopy," Ultramicroscopy 61, pp. 247-252, 1995.
6. G. Krausch, S. Wegscheider, A. Kirsch, H. Bielefeldt, J. C. Meiners, and J. Mlynek, "Near field microscopy and lithography with uncoated fiber tips: a comparison," Optics Communications 119, pp. 283-288, 1995.
7. C. Mihalcea, W. Scholz, S. Werner, S. Münster, E. Oesterschulze, and R. Kassing, "Multi-Purpose Sensor Tips for Scanning Nearfield Microscopy," Appl. Phys. Lett. 68(25), pp. 3531-3533, 1996.
8. S. Werner, S. Münster, S. Heisig, C. Mihalcea, W. Scholz, and E. Oesterschulze, "Application and Characterization of Combined SNOM/SFM Cantilever Probes," pp. 130-140, SPIE proceedings volume 3009-09, 1997.
9. B. Labani, C. Girard, D. Courjon, and D. Van Labeke, "Optical interaction between a dielectric tip and a nanometric lattice implications for near-field microscopy," J. Opt. Soc. Am. B7, pp. 936-943, 1990.
10. L. Novotny, D. W. Pohl, and P. Regli, "Light propagation through nanometer-sized structures: the two-dimensional-aperture scanning near-field optical microscope," 11, pp. 1768-1779, 1994.
11. D. Van Labeke and F. Barchiesi, Baida, "Optical characterization of nanosources used in scanning near-field optical microscopy," J. Opt. Soc. Am. 12, pp. 695-703, 1995.
12. L. Novotny, D. W. Pohl, and B. Hecht, "Light confinement in scanning nearfield optical microscopy," Ultramicroscopy 61, pp. 1-9, 1995.
13. L. Novotny, D. W. Pohl, and B. Hecht, "Scanning near-field optical probe with ultrasmall spot size," J. Opt. Soc. Am. 20, pp. 970-972, 1995.
14. S. Bozhevolnyi, "Topographical artifacts and optical resolution in near-field optical microscopy,"
15. G. v. Freymann, T. Schimmel, and M. Wegener, "Computer simulations: subwavelength resolution with an aperturless snom," Appl. Phys. A 66, pp. 939-942, 1998.
16. S. Münster, S. Werner, C. Mihalcea, W. Scholz, and E. Oesterschulze, "Novel micromachined cantilever sensors for scanning nearfield optical microscopy," Jour. Microscopy 186, pp. 17-22, 1997.
17. G. Eggers, A. Rosenberger, N. Held, G. Münnemann, A. Güntherodt, and P. Fumagalli, "Scanning near-field magneto-optic microscopy using illuminated fiber tips," Ultramicroscopy 71, pp. 249-256, 1998.
18. F. Matthes, H. Brückl, and G. Reiss, "Near-field magneto-optical microscopy in collection and illumination mode," Ultramicroscopy 71, pp. 243-248, 1998.
19. K. Nakajima, Y. Mitsuoka, N. Chiba, N. Muramatsu, T. Ataka, K. Sato, and M. Fujihira, "Polarization effects in scanning near-field optic/atomic-force microscopy (SNOM/AFM)," Ultramicroscopy 71, pp. 257-262, 1998.
20. E. Oesterschulze, O. Rudow, C. Mihalcea, W. Scholz, and S. Werner, "Cantilever Probes for SNOM Applications and Double Aperture Tips," Ultramicroscopy 71, pp. 99-105, 1998.
21. S. Werner, O. Rudow, C. Mihalcea, and E. Oesterschulze, "Cantilever Probes with Apertures Tips for Polarisation Sensitive Scanning Near-field Optical Microscopy," Appl. Phys. A 66, pp. 367-370, 1998.
22. Y. Leviatan, "Study of near-zone fields of a small aperture," J. Appl. Phys. 60, pp. 1577-1583, 1986.