Novel micromachined cantilever sensors for scanning near-field optical microscopy

Journal of Microscopy

Volumn 186, Issue 1, 1997, Pages 17-22

  Munster S ^a   Werner, S ^a   Mihalcea, C ^a   Scholz, W ^a   Oesterschulze, E ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

cantilever; HFCVD diamond membrane; scanning force microscopy; Scanning near field optical microscopy; SFM; SNOM; subwavelength resolution

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; NANOCANTILEVERS; OPTICAL DATA STORAGE; SCANNING TUNNELING MICROSCOPY;

CANTILEVER; CANTILEVER SENSORS; DIAMOND MEMBRANES; HFCVD DIAMOND; HFCVD DIAMOND MEMBRANE; MICROMACHINED CANTILEVER; SCANNING NEAR-FIELD OPTICAL MICROSCOPY; SFM; SUBWAVELENGTH RESOLUTION;

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

DIAGNOSTIC VALUE; PRIORITY JOURNAL; REPRODUCIBILITY; REVIEW; SCANNING FORCE MICROSCOPY; SCANNING NEAR FIELD OPTICAL MICROSCOPY; SENSOR;

EID: 0030984752     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.1997.00173.x     Document Type: Review

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