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Volumn 68, Issue 25, 1996, Pages 3531-3533
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Multipurpose sensor tips for scanning near-field microscopy
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CHROMIUM;
MICROMACHINING;
OPTICAL MICROSCOPY;
OPTICAL SYSTEMS;
SCANNING ELECTRON MICROSCOPY;
SILICA;
SILICON;
HOLLOW METAL TIPS;
OPTICAL BEAM DEFLECTION SYSTEM;
SCANNING NEAR FIELD OPTICAL MICROSCOPY;
SILICON CANTILEVERS;
SENSORS;
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EID: 0030173080
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.116520 Document Type: Review |
Times cited : (101)
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References (13)
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