Bottom electrode dependence of the properties of (Ba,Sr)TiO3 thin film capacitors

Materials Chemistry and Physics

Volumn 61, Issue 2, 1999, Pages 124-129

  Chul Choi, Young ^a   Soo Lee, Byung ^a  

^a Chonbuk National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; COMPOSITION EFFECTS; CRYSTAL MICROSTRUCTURE; CURRENT DENSITY; ELECTRODES; MAGNETRON SPUTTERING; PERMITTIVITY; PLATINUM; RUTHENIUM COMPOUNDS; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; THIN FILMS;

RUTHENIUM DIOXIDE;

CERAMIC CAPACITORS;

EID: 0032595150     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(99)00120-0     Document Type: Article

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