Leakage current behaviors of Ba0.5Sr0.5TiO3 thin films on Pt, RuO2, and Pt/RuO2 bottom electrodes

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 57-62

  Jo, W ^a   Kim, D C ^a   Kim, K Y ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; CRYSTAL MICROSTRUCTURE; ELECTRODES; FILM GROWTH; LEAKAGE CURRENTS; MAGNETRON SPUTTERING; PERMITTIVITY; PLATINUM; RUTHENIUM COMPOUNDS; THIN FILMS;

BOTTOM ELECTRODES; RADIOFREQUENCY MAGNETRON SPUTTERING;

SEMICONDUCTING FILMS;

EID: 0030399817     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-57     Document Type: Conference Paper

References (10)