Structural and dielectric properties of epitaxial SrTiO3 films grown on Si(100) substrate with TiN buffer layer

Journal of Applied Physics

Volumn 81, Issue 5, 1997, Pages 2358-2362

  Lee, M B ^a   Koinuma, H ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001681164     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364240     Document Type: Article

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