Autonomous impact resonator: a new operation principle for a silicon resonant strain gauge

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1105-1108

  Puers, Robert ^a   Bienstman, Jan ^a   Vandewalle, Joos ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT OSCILLATIONS; ELECTROSTATICS; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; STRAIN GAGES;

AUTONOMOUS IMPACT RESONATOR; CAPACITIVE MICROBRIDGE;

RESONATORS;

EID: 0030647231     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)