ELECTROSTATIC ACTUATORS FOR MICROMECHATRONICS.

Volumn , Issue , 1987, Pages

  Fujita, Hiroyuki ^a   Omodaka, Akito ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; SEMICONDUCTING SILICON;

ELECTROSTATIC DRIVE; ELECTROSTATIC MICROACTUATORS; LINEAR ACTUATOR; SILICON MICROMATCHING TECHNIQUES;

ACTUATORS;

EID: 0023587178     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)