ESD protection in thin film silicon on insulator technologies

Microelectronics Reliability

Volumn 38, Issue 11, 1998, Pages 1669-1680

  Smith, J C ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRIC SHIELDING; ELECTROSTATICS; MOSFET DEVICES; SEMICONDUCTOR DIODES; THIN FILM DEVICES;

ELECTROSTATIC DISCHARGE; PIN PROTECTION;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0032205074     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00170-X     Document Type: Article

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