Mass spectrometric investigations on CH4 plasmas obtained from a dual electron cyclotron resonance-radio frequency discharge

Plasma Sources Science and Technology

Volumn 7, Issue 4, 1998, Pages 607-616

  Zarrabian, M ^a   Leteinturier, C ^a   Turban, G ^a  

^a UNIVERSITÉ DE NANTES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRON CYCLOTRON RESONANCE; MASS SPECTROMETERS; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA SOURCES; THIN FILMS;

DIAMOND-LIKE CARBON THIN FILMS; ELECTRON CYCLOTRON RESONANCE PLASMA;

PLASMA DIAGNOSTICS;

EID: 0032204594     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/4/018     Document Type: Article

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