Planar surface-micromachined pressure sensor with a subsurface, embedded reference pressure cavity

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2882, Issue , 1996, Pages 259-265

  Eaton, William P ^a   Smith, James H ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL-MECHANICAL POLISHING; PIEZORESISTORS; PLANAR SURFACES; POLYSILICON;

DIAPHRAGMS; ETCHING; FABRICATION; METALLIZING; MICROMACHINING; PHOTOLITHOGRAPHY; POLISHING; SENSORS; SILICON NITRIDE; SURFACES;

PRESSURE MEASUREMENT;

EID: 0030396560     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)