Micro shutter for applications in optical and thermal detectors

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 67-70

  Kraus, Th ^a   Baltzer, M ^a   Obermeier, E ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; INFRARED RADIATION; MICROELECTROMECHANICAL DEVICES; MOTORS; ROTORS;

MICROSHUTTERS; OPTICAL DETECTORS; THERMAL DETECTORS;

OPTICAL SHUTTERS;

EID: 0030650765     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)