Applications of EFTEM elemental mapping with high spatial resolution to the nanocavity and modulated structure

Materials Transactions, JIM

Volumn 39, Issue 9, 1998, Pages 883-887

  Gao, Min ^a,b   Duan, X F ^a  

^a INSTITUTE OF PHYSICS   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Elemental mapping; Energy filtering transmission electron microscopy (EFTEM); Field emission gun (FEG); Gettering; Modulation structure; Multilayer film

Indexed keywords

ANNEALING; CARBON; COPPER ALLOYS; DIFFUSION IN SOLIDS; ELECTRON GUNS; HYDROGEN; ION IMPLANTATION; MULTILAYERS; OPTICAL RESOLVING POWER; OXYGEN; SHAPE MEMORY EFFECT; SILICON;

ELEMENTAL MAPPING; ENERGY-FILTERING TRANSMISSION ELECTRON MICROSCOPY (EFTEM); FIELD EMISSION GUNS (FEG);

TRANSMISSION ELECTRON MICROSCOPY;

EID: 0032157213     PISSN: 09161821     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans1989.39.883     Document Type: Article

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