Quantitative analysis of EFTEM elemental distribution images

Ultramicroscopy

Volumn 67, Issue 1-4, 1997, Pages 83-103

  Hofer, Ferdinand ^a   Grogger, Werner ^a   Kothleitner, Gerald ^a   Warbichler, Peter ^a  

^a GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Concentration ratios; Energy filtering transmission electron microscopy; Quantitative analysis

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; ELECTRON DIFFRACTION; ELECTRON SCATTERING; IONIZATION OF SOLIDS; TITANIUM NITRIDE;

ENERGY FILTERING TRANSMISSION ELECTRON MICROSCOPY (EFTEM);

TRANSMISSION ELECTRON MICROSCOPY;

ANALYTIC METHOD; ARTICLE; DATA ANALYSIS; ELECTRON DIFFRACTION; FILTRATION; IMAGE ANALYSIS; IONIZATION; QUANTITATIVE DIAGNOSIS; TISSUE DISTRIBUTION; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0031170942     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(96)00106-4     Document Type: Article

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